• Application: reduce a by-product accumulation came from the reaction of wafer process gas.
• Gas input: N2
• Gas flow: 20 litter/min – 150 litter/min
• Temp. range: 300±1℃
• N2 outlet set the temperature sensing rod.
• Heater with SUS stainless steel
• Heating way: halogen lamp (indirect heating).
• Warranty: One year.
• Voltage: 110 V~266V
• Power consumption: 500 W/1000W
• Heater weigh: 3.6KG
• Heater controller weigh: 6.1 Kg
• Gas connection: Swagelok 1/4 inch
• Max. power usage: 10KG/cm2G
• Heater size: L210 x 89 in diameter
• Heater controller size: 300 x 260 x 220