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Bearing

Bearing. Our supplier - Fala offers high performance bearings. We were the first to release thin-section ceramic hybrid bearings for semiconductor robotic applications. Ceramic bearings give clean long-life performance in many vacuum and atmospheric applications. High quality bearings last 2-4 times as long as OEM components and run considerably cleaner. Our design bearing specifications are optimized for every operating conditions. The bearing attributes Include:

Design	Full complement gothic
Materials	High stiffness ceramic balls, steel spacer balls
Shielding	Non-magnetic stainless, double sided
Dimension	Fine tolerances
Finish	Ultra fine
Lubrication	Optimized perfluoropolyether (PFPE) grease

--Bearing's Advantages--

	Attribute	Advantage	Benefits
Materials	SiN ball	Rigidity	Precision, vibration
Materials	SS spacer ball	Rolling resistance	Smoother motion, lifetime
Complement	Full	Stiffness	Precision vibration
Design	Gothic	Stiffness	Precision vibration
Design	Shielding	Traps grease	Lifetime, contamination
Tolerances	<0.0001 in.	Constant internal X- section	Lifetime, contamination
Finish	Ultra-fine	Rolling resistance	Lifetime
Lubrication	PFPE/PTFE	Vac. and temp. Resistant	Lifetime

All Fala ceramic hybrid bearings and related spare parts are a direct retrofit to existing installed tools. The robots include 200 mm HP™, HP+™ and VHP™ robots.

Full complement ceramic hybrid shielded bearings with PFPE-PTFE grease. Hub bearings use a proven 4-point contact design.

Trouble Free Performance Bearings are an important source of contamination and downtime. Fala bearing combines shielding, 4-point, full complement, and high precision to yield a 70% reduction in contamination, and a 4X improvement in bearing life. They eliminates wafer droop, are sold as integrated maintenance kits that include high performance blade housings.

Warranty, all Fala products are guaranteed 2-year / 600,000 wafer-processed.

Offering

Name	PN	Description
HP™ Standard	H22589	Hub, wrist, and elbow bearings for HP™ robot
HP™ Buffer	H22510	Hub, wrist, and elbow bearings for HP™ robot with new high precision buffer blade housing
HP™ Transfer	H22520	Hub, wrist, and elbow bearings for HP™ robot with new high precision transfer blade housing
HP™ Refill	H22570	Hub, wrist, and elbow bearings for HP™ robot already fitted with Fala housing
Bearings, pivots, and housings available separately.

Name	PN	Description
HP+™ Standard	H52980	Hub, wrist, and elbow bearings (top & bottom) for HP+™ robot
HP+™ Buffer	H52900	Hub, wrist, and elbow bearings for HP+™ robot with new high precision buffer blade housing
HP+™ Transfer	H52920	Hub, wrist, and elbow bearings for HP+™ robot with new high precision transfer blade housing
HP+™ Top	H22570	Hub, wrist, and top elbow bearings for HP+™ robot
Bearings, pivots, and housings available separately.

Name	PN	Description
VHP™ Standard	H52194	Hub, wrist, and elbow bearings for VHP™ robot
VHP™ Buffer	H52110	Hub, wrist, and elbow bearings for VHP™ robot with two new high precision transfer blade housings
VHP™ Refill	H52199	Hub, wrist, and elbow bearings for VHP™ robot already fitted with Fala housings
Bearings, pivots, and housings available separately.

Name	PN	Description
HP™ RTP Buffer	H22540	Hub, wrist, and elbow bearings for HP™ robot with new high precision buffer blade housing for quartz blade
HP™ Refill	H22570	Hub, wrist, and elbow bearings for HP™ robot already fitted Fala housing
HP™ RTP housing	A2009	Blade housing assembly for HP™ RTP robot
Bearings, pivots, and housings available separately.

Name	PN	Description
HP™ HDP kit	H22530	Hub, wrist, and elbow bearings for HP™ robot with new high precision buffer blade housing
HP™ Refill	H22570	Hub, wrist, and elbow bearings for HP™ robot fitted with Fala housing technology
HP™ HDP Wrist	A1100	High performance housing assembly with pivots and bearings for HP™ HDP robot
Bearings, pivots, and housings available separately.

Name	PN	Description
VHP+ etch kit	H52210-X	Hub, wrist, and elbow bearings for VHP+™ robot with new high precision buffer blade housing
VHP™ Refill	H52199	Hub, wrist, and elbow bearings for VHP+™ robot fitted with Fala housing technology
VHP+ etch housing	A2004	High performance housing for VHP+ etch application
Bearings, pivots, and housings available separately.

Name	PN	Description
Producer® loose	424000	Hub, wrist, and elbow bearings for Producer® robot
Producer® partial pre-assembled	R50005	Hub, wrist, and elbow bearings for Producer® robot with new high precision buffer blade housing
Producer® full pre-assembly	R50004	Hub, wrist, and elbow bearings for Producer® robot with new high precision transfer blade housing
Bearings and spare arms available separately.

All Fala ceramic hybrid bearings and related spare parts are a direct retrofit to existing installed tool configurations. The robots include 300 mm Centura®, Endura® and Producer® robots.

Full complement ceramic hybrid shielded bearings with PFPE-PTFE grease. Hub bearings are double-shielded and use an orientation independent 4-point contact design.

Trouble Free Performance Bearings are an important source of contamination and downtime. Fala combines shielding, 4-point, full complement, and high precision to yield a 70% reduction in contamination, and a 4X improvement in bearing life. They eliminates wafer droop, are sold as integrated maintenance kits that include high performance blade housings.

Warranty, all Fala products are guaranteed 2-year / 600,000 wafer-processed.

Offering

Name	PN	Description
Producer® loose	424000	Hub, wrist, and elbow bearings for Producer® robot
Producer® partial pre-assembled	R50005	Hub, wrist, and elbow bearings for Producer® robot with new high precision buffer blade housing
Producer® full pre-assembly	R50004	Hub, wrist, and elbow bearings for Producer® robot with new high precision transfer blade housing
Bearings and spare arms available separately.

The Centura® single blade robot can de difficult to repair in the field. Our manufacturer Fala has redesigned the assembly to reuse customer components and mitigate issues associated with the OEM design. Elbow bearings are shielded and carefully aligned, but Centura® PM kits are available pre-assembled only.

Name	PN	Description
VHP™ Standard	211300	Hub and elbow bearings, and 2 new housings for VHP™ robot
VHP™ refill	211300R	Hub, elbow, and wrist bearings for VHP™ robot with Fala housing technology
Blade Housing	A3000	High precision reusable blade housing with pivots and bearings.
Blade Housing	A3010	High precision reusable blade housing with pivots and bearings - enclosed gears
Bearings, pivots, and housings available separately

Name	PN	Description
VHP™ Standard	211300	Hub and elbow bearings, and 2 new housings for VHP™ robot
VHP™ refill	211300R	Hub, elbow, and wrist bearings for VHP™ robot using Fala housing technology
Blade housing	A3000	High precision reusable blade housing with pivots and bearings.
Blade housing	A3010	High precision reusable blade housing with pivots and bearings - enclosed gears
Bearings, pivots, and housings available separately.

XP™ robots are existed in Endura™ tools. As the robots cannot be repaired in the field, the waist assemblies must be taken apart using specialized equipment not available within a fab environment. Thus, a new duplex bearing has developed by our partner - Fala and an internal rework process that yields a cleaner and longer lasting assembly. In 2006, this remanufactured solution has been used worldwide.

All Fala XP™ bearings are warranted for 2 years or 600,000 wafer-processed.

Name	PN	Description
VxP™ Rework	R40200	Reworked customer-supplied waist assembly with 2 new duplex bearings, 8 elbow bearings and full pre-assembly.

　

We have housing solutions for all 200 mm and 300 mm tools. Our housings are made from 6061 Al with electroless nickel for durability. This design is ideal for high temperature applications. Inside of the housing, bearings are slip fit into the full body pivots.

Fala Pivots are made from tempered stainless steel. Pivots can be reused indefinitely.

Moreover, each pivot tooth is wire-EDM cut with a curve for proper energy transfer. No grease is needed between high precision gears.

Offering

All Fala housings are plated, field-maintenance friendly and reusable due to housings define the pivots' relative and absolute orientations. Our housings use tempered shafts, stiffening ridges and auto-torque design to guarantee proper blade alignment and long-term particle-free performance.

Product	Fala PN	OEM Ref.	Description	Picture
HP™ Buffer	A1000	0010-20130 0010-20128	Fala blade housings and clamps are designed to be reusable, droop-free and long lasting. Click for video animation of HP+™ housing. Notice the perfect meshing possible with curved wire EDM gears.
HP™/VHP™ Transfer	A1200	0020-21104 0020-21105	200 mm housings may look superficially identical but blade compatibility needs to be verified.
HP+™ Buffer	A2100	0010-13242 0010-75512
HP+™ Transfer	A2200	0021-22492 0040-23915
HDP Buffer	A1100	0010-02177 0010-02176	All Fala housings are built around similar design principles: 1- High precision wrist bearing (ceramic hybrid) 2- Tempered full body pivot with wire EDM teeth 3- Stainless steel shrunk fit shaft insert 4- Screw torque does not affect bearing loading 5- 6061 base and cover with electroless nickel finish
HP™ RTP Buffer	A2009	0010-02177 0010-02176
TiCl4 Buffer (CVD Ti-TiN)	A2300
VHP™ Ultima® 200	A2004	0200-00834 (blade ref.)
VHP™/XP™ 300	A3000	0020-75700 0010-17402 0010-17407 0010-29842 0040-50657
Centura® RTP 300	A3010	0020-75700 0010-17402 0010-17407 0010-29842 0040-50657

Fala Pivots are made from tempered stainless steel. All design is ideal for high temperature applications. OEM pivots are soft and deform over time, carry the off-axis load, and maintain left-right synchronization. We uses tempered steel and advanced machining to yield reusable high-precision parts that eliminate long-term droop, increase bearing life and reduce contamination.

Product	Fala PN	OEM Ref.	Description	Picture
Product	Fala PN	OEM Ref.	Description	Picture
HP™/VHP™ thin pivot	P1001 P1002	0020-70271 0020-70272	Thin pivot, tempered SS, high-precision gears, reusable, for use with OEM housings.
HP™/VHP™/RTP	P1101 P1102		Full-body pivot, tempered SS, high-precision gears, reusable, for use with Fala housings.
HP+™/VHP+™	P2001 P2002	0010-02170/ 0010-06681 0010-02171/ 0010-06682	Full-body pivot, tempered SS, high-precision gears, reusable, for use with Fala and OEM housings.
VHP™ Ultima® 200	P2005 P2006	0040-08075 0040-08076	Full-body pivot, tempered SS, high-precision gears, reusable, for use with Fala housings.
HP™ HDP			Full-body pivot, tempered SS, high-precision gears, extended travel, reusable, for use with Fala housings.
VHP™ 300/XP™	P3001 P3002	0010-02177 0010-02176	Full-body pivot, tempered SS, high-precision gears, reusable, for use with Fala 300 mm housings.

Today, cost-effective is an important issue controlled in every company, we can offer rework services for most 300 mm robot assemblies including XP™ Waist Assemblies, Producer® Arm Assemblies, Centura® 2-blades Preassembly, Centura® 1-blade Preassembly and Varian/TEL® MB2, M2i. In many cases,

we have replacement components and spares. Broken or worn out components are repaired or replaced from press-fit to slip-fit for an end user to do PM. All robots are carefully reassembled, this saves 4-5 hours per PM and eliminates torquing errors that result in wafer droop or compromised bearing life.

We have developed various processes that take existing robot arms and waist assemblies and bring them back to their original condition. Higher quality bearings are used to ensure that robot life is longer than OEM specification.

Offering

We maintain several XP™ spare waists that are used to shorten the lead time and help maintenance planning. Our XP™ Waist Assemblies includes PN R40001 & 40002. Basically, Endura™ XP™ robots cannot be repaired in the field. The waist assemblies must be taken apart using specialized equipment not available within a fab environment; therefore, Fala experienced technology have been extended the XP™ robots life time as longer as customer expectation.

After assembled XP™, our manufacturer very care about each reworked robots which are reliable; therefore, we have one set of testing process for XP™ robots reliability before they are returned to customers.

Fala XP™ rework advantages:

• Full complement duplex hybrid bearing

• Finer surface finish

• Optimized internal dimensions

• Optimized mechanical loading within the assemblies

• Normal lead time: 2 weeks

• All products are warranted to 600,000 wafer processed or 24 months
• Spare arm set for on-site swap

Producer arm rework includes Producer® Arm Assembly and Producer® Full Preassembly. As we found out the producer robot arm’s which elbow bearings are major source of particles and bearings are difficult to replace. In addition, since OEM bores are eccentric; therefore, our producer arm assembled including all bores restores concentricity and parallelism3-dimensional inspection. Re-machining robot arm bores are converted to slip fit from press-fit. Inner bore Ni plating. Honing. Exterior surfaces reconditioned. High-precision shielded ceramic hybrid bearings used.

Our producer arm aassemblies have three choices shown in the table. All products’ normal lead time is 2 weeks, warranted to 600,000 wafer processed or 24 months.

Item	Hub & Hub bearing	Producer arm
424000 2 hub bearings and 2 reworked arms
R50000 2 hubs and pre- assembled reworked arm assembly
R50004 preassembled hubs and arms

We have Centura® 2-blades Preassembly, PN 211300 and Centura® 1-blade Preassembly, PN R30000. Our skillful experiences save customers’ money for buying new robots to do PM. The reworked Centura robots are with shielded upper and lower elbow bearings. All products are warranted to 600,000 wafer processed or 24 months. Normal lead time: 2 weeks.

Varian/TEL® MB2, M2i. Our manufacturer - Fala has developed a set of high precision ceramic hybrid bearings for replacement parts and repairingthe M2i/MB2 Varian/TEL robot. We sell individual replacement bearings and mechanical repair services.
Each robot is taken apart, old bearings are moved, components are cleaned, repaired or replaced as needed and the robot ships back fully assembled.

Name	PN	Description
MB2™ Repair	R70000	Mechanical overhaul of MB2 robot. Includes replacement bearings and component repair. Broken or missing components are remanufactured or replaced.
MB2 elbow	E2600	Bearing, ceramic hybrid, shielded
MB2 elbow	E2200	Bearing, ceramic hybrid, shielded

Spindle rework, Fala has very skillful experience and many cases done in semiconductor industries。 Our DNS SU bearings have been success applied to OEM DNS tools. The total repair lead time is 2 weeks, and the replaced bearings are 100% tested for internal clearance。

Each shaft is individually inspected for balance and cylindricity to ensure the tools running as normal.

Offering

SEZ Da Vinci™ is a popular single wafer wet clean tool widely used in the industry. The many spindles are periodically replaced. Fala integrates numerous upgrades in the actual repair to yield reliable and long lasting parts.

In particular:
• Ceramic Hybrid High-Speed Ball Bearings
• Shielded Design
• Multiply Alkyl Cyclopentane Grease
• OEM PN 2328877 / 2352492
• Rated to 16,000 rpm!

DNS™ cleaning and wet etch tools contain high-speed chucks. Fala has developed a replacement bearing for those chucks that improves life by a factor of 3! The redesigned bearing incorporates state of the art technology:

• Ceramic Hybrid High-Speed Ball Bearing
• Shielded Design
• Multiply Alkyl Cyclopentane Grease
• Dual ball path
• PN E6000